File:B-d-irphotobondwave.png
Original file (1,107 × 360 pixels, file size: 222 KB, MIME type: image/png)
Description |
Infrared photograph of initiation and propagation of bonding wave in wafer bonding of silicon wafers (in style of \cite{TG1998}). (l) wafers are separated by an air layer and the bond process starts by pressure on top wafer. (m) bond wave moves to the etches. (r) a perfectly bonded wafer pair, not reflecting IR light. | ||
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Source |
Q.-Y. Tong and U. Gösele, Semiconductor Wafer Bonding: Science and Technology (1998) | ||
Date |
22:17, 29 March 2011 (UTC) | ||
Author | |||
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current | 22:17, 29 March 2011 | 1,107 × 360 (222 KB) | Enaswiki (talk | contribs) | {{Information |Description = Infrared photograph of initiation and propagation of bonding wave in wafer bonding of silicon wafers (in style of \cite{TG1998}). (l) wafers are separated by an air layer and the bond process starts by pressure on top wafe |
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