A photo of a goldsputter target showing the three principal parts: the cathode which is made of the material to be deposited; the anode that serves as a counterelectrode for the sputtering process and which is typically made of steel; and the protection ring, which prevents the surrounding hearth from being sputtered. The pictured target is in a ring geometry that is used with precious metals. A disk geometry is more common for less expensive materials.
Date
2 January 2006 (original upload date)
Source
No machine-readable source provided. Own work assumed (based on copyright claims).
Author
No machine-readable author provided. Chaiken assumed (based on copyright claims).
Credit
Photo taken by Alison Chaiken at HP Labs using a Nikon 995 camera. Improved using xfig. Originally uploaded as w:Autarget_mod.jpg.
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This licensing tag was added to this file as part of the GFDL licensing update.http://creativecommons.org/licenses/by-sa/3.0/CC BY-SA 3.0Creative Commons Attribution-Share Alike 3.0truetrue
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Under the following conditions:
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share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
A photo of a goldsputter target showing the three principal parts: the cathode which is made of the material to be deposited; the anode that serves as a counterelectrode for the sputtering process and which is typically made o